Scanning Thermal Microscopy Probes

A micro-fabricated SThM probe consisting a silicon nitride AFM cantilever and a thin film palladium thermistor located at the  tip. Manufactured using multi-level  electron beam lithography pioneered by the University of Glasgow, these probes combine a batch-fabricated functionalised probe technology with a conventional style chip and cantilever. Connection by gold tracks and pads allows biasing of the  thermistor to perform temperature  sensing and heat flow experiments. Other features include series NiCr resistors on the probe base to protect from ESD and match total resistance to most Wheatstone bridges, and a ribbed cantilever to increase stiffness and counteract temperature induced bending of the cantilever in hot environments. Sub 100nm topographic and thermal spatial resolution can be achieved.